This technique is used for
the analysis of precursor decomposition in MOVPE. Another prospect is
the measurement of adsorbed molecules on the growing surface with
Polarisation-Modulation Infrared Reflection Absorption Spectrometry
(PM-IRRAS).
For a good review of FTIR spectrometry (in German) see
www.ir-spektroskopie.de
FTIR setup as used at our MOVPE reactor
