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Homepage Markus Pristovsek

Rendering of our in-situ STM for MOVPE by Dr. R. Kremzow

Working in the field of


surface science during semiconductor growth
or
very small molecules on very hot surfaces ...

For that I developed, built, and applied innovative
(mostly optical) monitoring tools to measure in-situ
during the growth process.


 

    my motto

 

    what I'm doing else

 

    about myself

 

    address

 

    Book Chapter and Thesis

  1. In-situ monitoring towards monolayer precision for III-V semiconductor growth
    M. Pristovsek
    Habilitation, Technische Universität Berlin (2012)

  2. Semiconductor Nanostructures
    M. Pristovsek, W. Richter
    (Springer, Berlin-Heidelberg-New York, 2008) Chapter 3, 67–86

  3. Fundamental Growth Processes on Different Gallium Arsenide Surfaces in Metal-Organic Vapor Phase Epitaxy
    M. Pristovsek
    Ph.D. thesis, Technische Universität Berlin (2000)

 

    Refereed Papers

Partially also contained in the literature listing of the Kneissl group.

  1. Development of InAs quantum dots during growth on GaAs (001)
    M. Pristovsek, R. Kremzow, M. Kneissl
    Phys. Rev. Lett. (submitted)

  2. Direct growth of InxGa1-xN on (0001) sapphire using metal-organic vapor phase epitaxy
    Duc V. Dinh, S. Solopow, C. Friedrich, S. Alame, M. Pristovsek, M. Kneissl
    J. Crystal Growth (submitted)

  3. Wetting layer thickness of InGaN quantums dots on GaN (0001)
    M. Pristovsek, A. Kadir, C. Meissner, T. Schwaner, M. Leyer, J. Stellmach, M. Kneissl, F. Ivaldi, S. Kret
    J. Crystal Growth (under revision)

  4. Influence of group III and group V partial pressures on the size and density of InGaN quantum dots in MOVPE
    A. Kadir, K. Bellmann, T. Simoneit, M. Pristovsek, M. Kneissl
    phys. stat. sol. (a) (under revision)

  5. Role of nitridation on the growth and the polarity of InN by metal-organic vapor phase epitaxy
    Duc V. Dinh, D. Skuridina, S. Solopow, M. Pristovsek, P. Vogt, M. Kneissl
    J. Appl. Phys. (submitted)

  6. Topography of (20-21) AlGaN, GaN and InGaN layers grown by metal-organic vapor phase epitaxy
    S. Ploch, T. Wernicke, J. Thalmair, M. Lohr, M. Pristovsek, M. Weyers, J. Zweck, M. Kneissl
    J. Crystal Growth (accepted)

  7. MOVPE growth of semipolar (11-22) AlN on (10-10) sapphire
    J. Stellmach, M. Frentrup, F. Mehnke, M. Pristovsek, T. Wernicke, M. Kneissl
    J. Crystal Growth 335 (2012) 59-62

  8. Growth and Characterizations of Semipolar (11-22) InN
    Duc V. Dinh, D. Skuridina, S. Solopow, M. Frentrup, M. Pristovsek, P. Vogt, M. Kneissl, F. Ivaldi, S. Kret, A. Szczepanska
    J. Appl. Phys. 112 (2012) 013530

  9. In situ access to the dielectric anisotropy of buried III-V/Si(100) heterointerfaces
    Oliver Supplie, Thomas Hannappel, Markus Pristovsek, Hennig Döscher
    Phys. Rev. B 86 (2012) 035308

  10. Surface diffusion and layer morphology of (11-22) GaN grown by metal-organic vapor phase epitaxy
    S. Ploch, T. Wernicke, D. V. Dinh, M. Pristovsek, M. Kneissl
    J. Appl. Phys. 111 (2012) 033526

  11. Comparison study of N- and In-polar {0001} InN layers grown by MOVPE
    Duc V. Dinh, M. Pristovsek, S. Solopow, D. Skuridina, M. Kneissl
    phys. stat. sol. (c) 9(3-4) (2012) 977-981

  12. Surface transition induced island formation on thin strained InGaN layers on GaN (0001) in metal-organic vapour phase epitaxy
    M. Pristovsek, A. Kadir, C. Meissner, T. Schwaner, M. Leyer, M. Kneissl
    J. Appl. Phys. 110 (2011) 073527

  13. Growth mechanism of InGaN quantum dots during metalorganic vapour phase epitaxy
    A. Kadir, C. Meissner, T. Schwaner, M. Pristovsek, M. Kneissl
    J Crystal Growth 314 (2011) 40–45

  14. Single phase 11-22 GaN on (10-10) sapphire grown by metal-organic vapor phase epitaxy
    S. Ploch, J. B. Park, J. Stellmach, T. Schwaner, M. Frentrup, T. Niermann, T. Wernicke, M. Pristovsek, M. Lehmann, M. Kneissl
    J Crystal Growth 331 (2011) 25–28

  15. Growth Mechanism of Embedded Self-Organized InN Quantum Dots on GaN (0001) in MOVPE
    F. Ivaldi, J. Domagala, S. Kret, C. Meissner, M. Pristovsek, M. Högele, M. Kneissl
    Jap. J. Appl Phys. 50 (2011) 031004

  16. Crystal orientation of GaN layers on (10-10) Sapphire
    M. Frentrup, S. Ploch, M. Pristovsek, M. Kneissl
    phys. stat. sol. (b) 248 (3) (2011) 583–587

  17. High aluminium content and high growth rates of AlGaN in a close-coupled showerhead MOVPE reactor
    J. Stellmach, M. Pristovsek, . Savaş, J. Schlegel, E. Y. Yakovlev, M. Kneissl
    J. Crystal Growth 315 (2011) 229–232

  18. Determination of the complex linear electro-optic coefficient of GaAs and InP
    M. Pristovsek
    phys. stat. sol. (b) 247 (2010) 1974–1978

  19. Orientation control of GaN 11-22 and 10-13 grown on (10-10) sapphire by metal-organic vapor phase epitaxy
    S. Ploch, M. Frentrup, T. Wernicke, M. Pristovsek, M. Weyers, M. Kneissl
    J. Crystal Growth 312 (2010) 2171–2174

  20. Growth of semipolar (10-1-3) InN on m-plane sapphire using metal-organic vapor phase epitaxy
    D. V. Dinh, M. Pristovsek, R. Kremzow, M. Kneissl
    phys. stats. sol. RRL 4 (2010) 127–129

  21. Metalorganic Vapor Phase Epitaxy of InN on GaN using tertiary-butylhydrazine as Nitrogen Source
    R. Kremzow, M. Pristovsek, J. Stellmach, . Savas, M. Kneissl
    J. Crystal Growth 312 (2010) 1983–1985

  22. Shape of InN nanostructures on GaN (001)
    S. Ploch, C. Meißner, M. Pristovsek, M. Kneissl
    phys. stat. sol. (c) 6(S2) (2009) S574–S577

  23. Growth mode of InGaN on GaN (0001) in MOVPE
    M. Pristovsek, J. Stellmach, M. Leyer, M. Kneissl
    phys. stat. sol. (c) 6(S2) (2009) S565–S569

  24. Volmer-Weber growth mode on InN quantum dots on GaN (0001) by MOVPE
    C. Meißner, S.Ploch, M. Pristovsek, M. Kneissl
    phys. stat. sol. (c) 6(S2) (2009) S545–S548

  25. Growth and characterisation of manganese doped InAsP
    M. Pristovsek, C. Meißner, M. Kneissl, R. Jakomin, S. Vantaggio, L. Tarricone
    J. Crystal Growth 310 (2008) 5028–5031

  26. Indium nitride quantum dot growth modes in metalorganic vapour phase epitaxy
    C. Meissner, S. Ploch, M. Leyer, M. Pristovsek, M. Kneissl
    J. Crystal Growth 310 (2008) 4959–4962

  27. The critical thickness of InGaN on (0001) GaN
    M. Leyer, J. Stellmach, C. Meissner, M. Pristovsek, M. Kneissl
    J. Crystal Growth 310 (2008) 4913–4915

  28. Ripening of InAs quantum dots on GaAs (0 0 1) investigated with in situ scanning tunneling microscopy in metal-organic vapor phase epitaxy
    R. Kremzow, M. Pristovsek, M. Kneissl
    J. Crystal Growth 310 (2008) 4751–5753

  29. Properties of InMnP (0 0 1) grown by MOVPE
    M. Pristovsek, A. Philippou, B. Rähmer, W. Richter
    J. Crystal Growth 310 (2008) 4046–4049

  30. Segregation and desorption of antimony in InP in MOVPE
    S. Weeke, M. Leyer, M. Pristovsek, F. Brunner, W. Richter
    J. Crystal Growth 298 (2007) 159–162

  31. Homoepitaxial growth rate measurement using in-situ Reflectance Anisotropy Spectroscopy
    C. Kaspari, M. Pristovsek, W. Richter
    J. Crystal Growth 298 (2007) 46–49

  32. in-situ Scanning Tunnelling Microscopy during Metal-Organic Vapour Phase Epitaxy
    M. Pristovsek, B. Rähmer, M. Breusig, R. Kremzow, W. Richter
    J. Crystal Growth 298 (2007) 8–11

  33. Modified STM images growth inside an MOCVD chamber
    M. Pristovsek
    compound semiconductor 11 (2006) 14–16

  34. In-situ Scanning Tunneling Microscopy during Metal-organic Vapour Phase Epitaxy
    B. Rähmer, M. Pristovsek, M. Breusing, R. Kremzow, W. Richter
    Appl. Phys. Lett. 89(6) (2006) 063108

  35. InN growth on sapphire using different nitridation procedures
    M. Drago, C. Werner, M. Pristovsek, U. W. Pohl, W. Richter
    phys. stat. sol. (a) 203 (2006) 1622–1625

  36. Development of InN metalorganic vapor phase epitaxy using in-situ spectroscopic ellipsometry
    M. Drago, C. Werner, M. Pristovsek, U. W. Pohl, W. Richter
    Crys. Res. Technol. 40(10-11) (2005) 993–996

  37. A fast reflectance anisotropy spectrometer for in situ growth monitoring
    C. Kaspari, M. Pristovsek, W. Richter
    phys. stat. sol. (b) 242(13) (2005) 2561–2569

  38. Growth of strained GaAsSb layers on GaAs (001) in MOVPE
    M. Pristovsek, M. Zorn, U. Zeimer, M. Weyers
    J. Crystal Growth 276 (2005) 347–353

  39. InN Growth and Annealing Investigations using in-situ Spectroscopic Ellipsometry
    M. Drago, T. Schmidtling, C. Werner, M. Pristovsek, U. Pohl, W. Richter
    J. Crystal Growth 272 (2004) 87–93

  40. Nitrogen.arsenic exchange processes and investigation of the nitrided GaAs surfaces in MOVPE
    V. Hoffmann, F. Poser, C. Kaspari, S. Weeke, M. Pristovsek, W. Richter
    J. Crystal Growth 272 (2004) 30–36

  41. Structural analysis by reflectance anisotropy spectroscopy: As and Sb on GaAs(110)
    O. Pulci, K. Fleischer, M. Pristovsek, S. Tsukamoto, R. D. Sole, W. Richter
    J. Phys.: Cond. Matter 16 (2004) S4367–S4374

  42. In-situ study of low-temperature growth and Mn and Si and Sn doping of GaAs (001) in molecular beam epitaxy
    M. Pristovsek, S. Tsukamoto
    J. Crystal Growth 265 (2004) 425–433

  43. Lateral short range ordering of step bunches in InGaAs/GaAs superlattices
    M. Hanke, M. Schmidbauer, R. Kühler, H. Kirmse, M. Pristovsek
    J. Appl. Phys. 95(4) (2004) 1736–1739

  44. In-situ study of GaAs growth mechanisms using tri-methyl gallium and tri-ethyl gallium precursors in MOVPE
    M. Pristovsek, M. Zorn, M. Weyers
    J. Crystal Growth 262 (2004) 78–83

  45. Gallium-rich reconstructions on GaAs(001)
    M. Pristovsek, S. Tsukamoto, A. Ohtake, N. Koguchi, B. G. Orr, W. G. Schmidt, J. Bernholc
    phys. stat. sol. b 240 (2003) 91–98

  46. In situ scanning tunneling microscopy of InAs quantum dots on GaAs(0 0 1) during molecular beam epitaxial growth
    G. R. Bell, M. Pristovsek, S. Tsukamoto, B. G. Orr, Y. Arakawa, N. Koguchi
    Surf. Sci. 544(2-3) (2003) 234–240

  47. Ga-rich GaAs(0 0 1) surfaces observed by STM during high-temperature annealing in MBE
    S. Tsukamoto, M. Pristovsek, A. Ohtake, B. G. Orr, G. R. Bell, T. Ohno, N. Koguchi
    J. Crystal Growth 251 (2003) 46–50

  48. Influence of the reconstruction of GaAs (0 0 1) on the electro-optical bulk properties
    M. Pristovsek, S. Tsukamoto, B. Han, J.-T. Zettler, , W. Richter
    J. Crystal Growth 248 (2003) 254–258

  49. Structure of Ga-stabilized GaAs(0 0 1) surfaces at high temperatures
    A. Ohtake, S. Tsukamoto, M. Pristovsek, N. Koguchi
    Appl. Surf. Sci. 212-213 (2003) 146–150

  50. Novel Organopalladium Material Formed on a Sulfur-Terminated GaAs(001) Surface
    M. Arisawa, S. Tsukamoto, M. Shimoda, M. Pristovsek, A. Nishida
    Jpn. J. Appl. Phys. 41(11A) (2002) L1197–L1199

  51. Structure analysis of the Ga-stabilized GaAs(001) - c(8x2) surface at high temperatures
    A. Ohtake, S. Tsukamoto, M. Pristovsek, N. Koguchi, M. Ozeki
    Phys. Rev. B 65 (2002) 233311

  52. Real-time calibration of wafer temperature and growth rate and composition by optical in-situ techniques during AlxGa1-xAs growth in MOVPE
    K. Haberland, A. Kaluza, M. Zorn, M. Pristovsek, H. Hardtdegen, M. Weyers, J.-T. Zettler, W. Richter
    J. Crystal Growth 240 (2002) 87–97

  53. In-situ Determination of the Carrier Concentration of (001) GaAs by Reflectance Anisotropy Spectroscopy
    M. Pristovsek, S. Tsukamoto, N. Koguchi, B. Han, K. Haberland, J.-T. Zettler, W. Richter, M. Zorn, M. Weyers
    phys. stat. sol. (a) 188 (2001) 1423–1429

  54. In-situ Investigation of GaAs (001) Intrinsic Carbon p-Doping in Metal-organic Vapour Phase Epitaxy
    M. Pristovsek, B. Han, J.-T. Zettler, W. Richter
    J. Crystal Growth 221 (2000) 149–155

  55. Surface structure of ordered InGaP(001): The (2x4) reconstruction
    P. Vogt, K. Lüdge, M. Zorn, M. Pristovsek, W. Braun, W. Richter, N. Esser
    Phys. Rev. B 62(19) (2000) 12601–12604

  56. Atomic structure and composition of the (2x4) reconstruction of InGaP(001)
    P. Vogt, K. Lüdge, M. Zorn, M. Pristovsek, W. Braun, W. Richter, N. Esser
    J. Vac. Sci. Technol. B 18 (2000) 2210–2214

  57. Diffusion of Ga on GaAs (113) in [1-10] direction in MOVPE
    M. Pristovsek, F. Poser, J.-T. Zettler, W. Richter
    Appl. Surf Sci. 166 (2000) 433–436

  58. Dynamic Study of the Surfaces of (001) Gallium Arsenide in Metal-organic Vapour Phase Epitaxy during Arsenic Desorption
    M. Pristovsek, T. Trepk, M. Klein, J.-T. Zettler, W. Richter
    J. Appl. Phys. 87 (2000) 1245–1250

  59. GaP(001) and InP(001): Reflectance Anisotropy and Surface Geometry
    N. Esser, W. Schmidt, J. Bernholc, A. Frisch, P. Vogt, M. Zorn, M. Pristovsek, W. Richter, F. Bechstedt, T. Hannappel, S. Visbeck
    J. Vac. Sci. Technol. B 17 (1999) 1691–1696

  60. The (2x4) GaP(001) Surface: Atomic Structure and Optical Anisotropy
    A. Frisch, W. Schmidt, J. Bernholc, M. Pristovsek, N. Esser, W. Richter
    Phys. Rev. B 60(4) (1999) 2488–2494

  61. Spectroscopic process sensors in MOVPE device production
    K. Haberland, P. Kurpas, M. Pristovsek, J.-T. Zettler, M. Weyers, W. Richter
    Appl. Phys. A 68 (1999) 309–313

  62. Comparative study of the GaAs (113) and (115) and (001) and (11-5) and (11-3) and and (110) surfaces by atomic force microscopy and low energy electron diffraction and and reflectance anisotropy spectroscopy
    M. Pristovsek, H. Menhal, T. Schmidtling, N. Esser, W. Richter
    Microelectronics Journal 30 (1999) 449–453

  63. In situ characterization of GaAs growth in nitrogen atmosphere during MOVPE: a comparison to hydrogen atmosphere
    H. Hardtdegen, M. Pristovsek, H. Menhal, J.-T. Zettler, W. Richter, D. Schmitz
    J. Crystal Growth 195 (1998) 211–216

  64. Response of the surface dielectric function to dynamic surfaces modifications: application of reflectance anisotropy spectroscopy and spectroscopic ellipsometry
    J.-T. Zettler, M. Pristovsek, T. Trepk, A. Shkrebtii, E. Steimetz, M. Zorn, W. Richter
    Thin Solid Films 313-314 (1998) 537–543

  65. Real-time monitoring of MOVPE device growth by reflectance anisotropy spectroscopy and related optical techniques
    J.-T. Zettler, K. Haberland, M. Zorn, M. Pristovsek, W. Richter, P. Kurpas, , M. Weyers
    J. Crystal Growth 195 (1998) 151–162

  66. Reconstructions of the GaAs (113) surface
    M. Pristovsek, H. Menhal, T. Wehnert, J.-T. Zettler, T. Schmidtling, N. Esser, W. Richter, C. Setzer, J. Platen, K. Jacobi
    J. Crystal Growth 195 (1998) 1–5

  67. Photoluminescence scanning nearfield optical microscopy on III-V quantum dots
    D. Pahlke, F. Poser, E. Steimetz, M. Pristovsek, N. Esser, W. Richter
    phys. stat. sol. (a) 170 (1998) 401

  68. Atomic structure of InP(001)-(2x4): A dimer reconstruction
    W. Schmidt, F. Bechstedt, N. Esser, M. Pristovsek, C. Schultz, W. Richter
    Phys. Rev. B. 57(23) (1998) 14596–14599

  69. Ellipsometric and Reflectance-Anisotropy Measurements on Rotating Samples
    K. Haberland, O. Hunderi, M. Pristovsek, J.-T. Zettler, W. Richter
    Thin Solid Films 313-314 (1998) 620–624

  70. Optical anisotropies of InP(001) surfaces
    C. Goletti, N. Esser, U. Resch-Esser, V. Wagner, J. Foeller, M. Pristovsek, W. Richter
    J. Appl. Phys. 81 (1997) 3611–3615

  71. Structure of InP (001) surfaces prepared by decapping and by ion bombardment and annealing
    D. Pahlke, J. Kinsky, C. Schultz, M. Pristovsek, M. Zorn, N. Esser, W. Richter
    Phys. Rev. B 56 (1997) R1661–R1663

  72. In-situ surface passivation of III-V-semiconductors in MOVPE by amorphous As and P layers
    K. Knorr, M. Pristovsek, U. Resch-Esser, N. Esser, M. Zorn, W. Richter
    J. Crystal Growth 170 (1997) 230–236

  73. Semiconductor Characterization - Present Status and Future Needs
    J.-T. Zettler, W. Richter, K. Ploska, M. Zorn, J. Rumberg, C. Meyne, M. Pristovsek
    (AIP Press Woodbury NY, 1996) 537–543

  74. Scanning-tunneling-microscopy study of InP (001) surfaces prepared by UHV decapping of MOVPE-grown samples
    N. Esser, U. Resch-Esser, M. Pristovsek, W. Richter
    Phys. Rev. B 53(20) (1996) R13257–R13259

  75. Growth oscillations with monolayer periodicity monitored by ellipsometry during MOVPE of GaAs (001)
    J.-T. Zettler, T. Wethkamp, M. Zorn, M. Pristovsek, C. Meyne, K. Ploska, W. Richer
    Appl. Phys. Lett. 67 (1995) 3783–3785

  76. Metalorganic Vapour Phase Epitaxial Growth on Vicinal GaAs (001) Surfaces Studied by Reflectance Anisotropy Spectroscopy
    K. Ploska, M. Pristovsek, W. Richter, J. Jönsson, I. Kamiya, J.-T. Zettler
    phys. stat. sol. (a) 152 (1995) 49–59

  77. Reflectance Anisotropy Oscillations during MOCVD and MBE Growth of GaAs (001)
    J.-T. Zettler, J. Rumberg, K. Ploska, K. Stahrenberg, M. Pristovsek, W. Richter, M. Wassermeier, P. Schützendüwe, L. Däweritz
    phys. stat. sol. (a) 152 (1995) 35–47

  78. Surface processes before and during growth of GaAs(001)
    K. Ploska, J.-T. Zettler, W. Richter, J. Jönsson, F. Reinhardt, J. Rumberg, M. Pristovsek, M. Zorn, D. Westwood, R. H. Williams
    J. Crystal Growth 145 (1994) 44–52

  79. Efficiency of arsenic and phosphorous precursors investigated by reflectance anisotropy spectroscopy
    P. Kurpas, J. Jönsson, W. Richter, D. Gutsche, M. Pristovsek, M. Zorn
    J. Crystal Growth 145 (1994) 36–43

 

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