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Epitaxie und in-situ-Charakterisierung mit RAS,
Dotierung, Diffusion und Oberflächenprozesse

 

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Teilweise auch in der Literaturliste der Forschungsgruppe Kneissl zu finden.

  1. Efficiency of arsenic and phosphorous precursors investigated by reflectance anisotropy spectroscopy
    P. Kurpas, J. Jönsson, W. Richter, D.Gutsche, M. Pristovsek, M. Zorn
    J. Crystal Growth 145 (1994) 36-43

  2. Surface processes before and during growth of GaAs(001)
    K. Ploska, J.-T. Zettler, W. Richter, J. Jönsson, F. Reinhardt, J. Rumberg, M. Pristovsek, M. Zorn, D. Westwood, R. H. Williams
    J. Crystal Growth 145 (1994) 44-52

  3. Reflectance Anisotropy Oscillations during MOCVD and MBE Growth of GaAs (001)
    J.-T. Zettler, J. Rumberg, K. Ploska, K. Stahrenberg, M. Pristovsek, W. Richter, M. Wassermeier, P. Schützendüwe and L. Däweritz
    phys. stat. sol. (a) 152 (1995) 35-47

  4. Metalorganic Vapour Phase Epitaxial Growth on Vicinal GaAs (001) Surfaces Studied by Reflectance Anisotropy Spectroscopy
    K. Ploska, M. Pristovsek, W. Richter, J. Jönsson, I. Kamiya and J.-T. Zettler
    phys. stat. sol. (a) 152 (1995) 49-59

  5. Growth oscillations with monolayer periodicty monitored by ellipsometry during MOVPE of GaAs (001)
    J.-T. Zettler, T. Wethkamp, M. Zorn, M. Pristovsek, C. Meyne, K. Ploska, W. Richer
    Appl. Phys. Lett. 67 (1995) 3783-3785

  6. Scanning-tunneling-microscopy study of InP (001) surfaces prepared by UHV decapping of MOVPE-grown samples
    N. Esser, U. Resch-Esser, M. Pristovsek, W. Richter
    Phys. Rev. B 53(20) (1996) R13257-13259

  7. Real time diagnostics of semiconductor surface modifications by RAS
    J.-T. Zettler, W. Richter, K. Ploska, M. Zorn, J. Rumberg, C. Meyne, M. Pristovsek
    in Semiconductor Characterization -Present Status and Future Needs
    Ed. by W. Bullis, D. Seiler, A. Diebold (AIP Press Woodbury NY 1996) 537-543

  8. In-situ surface passivation of III-V-semiconductors in MOVPE by amorphous As and P layers
    K. Knorr, M. Pristovsek, U. Resch-Esser, N. Esser, M. Zorn, W. Richter
    J. Crystal Growth 170 (1997) 230-236

  9. Structure of InP (001) surfaces prepared by decapping and by ion bombardment and annealing
    D. Pahlke, J. Kinsky, Ch. Schultz, M. Pristovsek, M. Zorn, N. Esser, W. Richter
    Phys. Rev. B 56 (1997) R1661-R1663

  10. Optical anisotropies of InP(001) surfaces
    C. Goletti, N. Esser, U. Resch-Esser, V. Wagner, J. Foeller, M. Pristovsek, W. Richter
    J. Appl. Phys. 81 (1997) 3611-3615

  11. Response of the surface dielectric function to dynamic surfaces modifications: application of reflectance anisotropy spectroscopy and spectroscopic ellipsometry
    J.-T. Zettler, M. Pristovsek, T. Trepk, A. Shkrebtii, E. Steimetz, M. Zorn, W. Richter
    Thin Solid Films 313-314 (1998) 537-543

  12. Ellipsometric and Reflectance-Anisotropy Measurements on Rotating Samples
    K. Haberland, O. Hunderi, M. Pristovsek, J.-T. Zettler, W. Richter
    Thin Solid Films 313-314 (1998) 620-624

  13. Atomic structure of InP(001)-(2x4): A dimer reconstruction
    W.G. Schmidt, F. Bechstedt, N. Esser, M. Pristovsek, Ch. Schultz, W. Richter
    Phys. Rev. B. 57(23) (1998) 14596-14599

  14. Photoluminescence scanning nearfield optical microscopy on III-V quantum dots
    D. Pahlke, F. Poser, E. Steimetz, M. Pristovsek, N. Esser, W. Richter
    phys. stat. sol. (a) 170 (1998) 401

  15. Reconstructions of the GaAs (113) surface
    M. Pristovsek, H. Menhal, T. Wehnert, J.-T. Zettler, T. Schmidtling, N. Esser, W. Richter, C. Setzer, J. Platen, K. Jacobi
    J. Crystal Growth 195 (1998) 1-5

  16. Real-time monitoring of MOVPE device growth by reflectance anisotropy spectroscopy and related optical techniques
    J.-T. Zettler, K. Haberland, M. Zorn, M. Pristovsek, W. Richter, P. Kurpas, and M. Weyers
    J. Crystal Growth 195 (1998) 151-162

  17. In situ characterization of GaAs growth in nitrogen atmosphere during MOVPE: a comparison to hydrogen atmosphere
    H. Hardtdegen, M. Pristovsek, H. Menhal, J.-T. Zettler, W. Richter, D. Schmitz
    J. Crystal Growth 195 (1998) 211-216

  18. Comparative study of the GaAs (113), (115), (001), (11-5), (11-3), and (110) surfaces by atomic force microscopy, low energy electron diffraction, and reflectance anisotropy spectroscopy
    M. Pristovsek, H. Menhal, T. Schmidtling, N. Esser, W. Richter
    Microelectronics Journal 30 (1999) 449-453

  19. Spectroscopic process sensors in MOVPE device production
    K. Haberland, P. Kurpas, M. Pristovsek, J.-T. Zettler, M. Weyers, W. Richter
    Appl. Phys. A 68 (1999) 309-313

  20. The (2x4) GaP(001) Surface: Atomic Structure and Optical Anisotropy
    A.M. Frisch, W.G. Schmidt, J. Bernholc, M. Pristovsek, N. Esser, W. Richter
    Phys. Rev. B 60(4) (1999) 2488-2494

  21. GaP(001) and InP(001): Reflectance Anisotropy and Surface Geometry
    N. Esser, W.G. Schmidt, J. Bernholc, A:M. Frisch, P. Vogt, M. Zorn, M. Pristovsek, W. Richter, F. Bechstedt, Th. Hannappel, S. Visbeck
    J. Vac. Sci. Technol. B 17 (1999) 1691-1696

  22. Dynamic Study of the Surfaces of (001) Gallium Arsenide in Metal-organic Vapour Phase Epitaxy during Arsenic Desorption
    M. Pristovsek, T. Trepk, M. Klein, J.-T. Zettler, W. Richter
    J. Appl. Phys. 87 (2000) 1245-1250

  23. Diffusion of Ga on GaAs (113) in [1-10] direction in MOVPE
    M. Pristovsek, F. Poser, J.-T. Zettler, W. Richter
    Appl. Surf Sci. 166 (2000) 433-436

  24. Atomic structure and composition of the (2x4) reconstruction of InGaP(001)
    P. Vogt, K. Lüdge, M. Zorn, M. Pristovsek, W. Braun, W. Richter, N. Esser
    J. Vac. Sci. Technol. B 18 (2000) 2210-2214

  25. Surface structure of ordered InGaP(001): The (2x4) reconstruction
    P. Vogt, K. Lüdge, M. Zorn, M. Pristovsek, W. Braun, W. Richter, N. Esser
    Phys. Rev. B 62(19) (2000) 12601-12604

  26. In-situ Investigation of GaAs (001) Intrinsic Carbon p-Doping in Metal-organic Vapour Phase Epitaxy
    Markus Pristovsek, Bing Han, Jörg-Thomas Zettler, Wolfgang Richter
    J. Crystal Growth 221 (2000) 149-155

  27. Fundamental Growth Processes on Different Gallium Arsenide Surfaces in Metal-Organic Vapor Phase Epitaxy
    Markus Pristovsek
    Doktorarbeit, Technische Universität Berlin (2000)

  28. In-situ Determination of the Carrier Concentration of (001) GaAs by Reflectance Anisotropy Spectroscopy
    M. Pristovsek, S. Tsukamoto, N. Koguchi, B. Han, K. Haberland, J.-T. Zettler, W. Richter, M. Zorn, M. Weyers
    phys. stat. sol. (a) 188 (2001) 1423-1429

  29. Real-time calibration of wafer temperature, growth rate and composition by optical in-situ techniques during AlxGa1-xAs growth in MOVPE
    K. Haberland, A. Kaluza, M. Zorn, M. Pristovsek, H. Hardtdegen, M. Weyers, J.-T. Zettler, W. Richter
    J. Crystal Growth 240 (2002) 87-97

  30. Structure analysis of the Ga-stabilized GaAs(001) - c(8x2) surface at high temperatures
    Akihiro Ohtake, Shiro Tsukamoto, Markus Pristovsek, Nobuyuki Koguchi, Masashi Ozeki
    Phys. Rev. B 65 (2002) 233311

  31. Novel Organopalladium Material Formed on a Sulfur-Terminated GaAs(001) Surface
    Mitsuhiro Arisawa, Shiro Tsukamoto, Masahiko Shimoda, Markus Pristovsek, Atsushi Nishida
    Jpn. J. Appl. Phys. 41(11A) (2002) L1197-L1199

  32. Structure of Ga-stabilized GaAs(0 0 1) surfaces at high temperatures
    A. Ohtake, S. Tsukamoto, M. Pristovsek, N. Koguchi
    Appl. Surf. Sci. 212-213 (2003) 146-150

  33. Influence of the reconstruction of GaAs (0 0 1) on the electro-optical bulk properties
    M. Pristovsek, S. Tsukamoto, B. Han, J.-T. Zettler, and W. Richter
    J. Crystal Growth 248 (2003) 254-258

  34. Ga-rich GaAs(0 0 1) surfaces observed by STM during high-temperature annealing in MBE
    Shiro Tsukamoto, Markus Pristovsek, Akihiro Ohtake, Bradford G. Orr, Gavin R. Bell, Takahisa Ohno, Nobuyuki Koguchi
    J. Crystal Growth 251 (2003) 46-50

  35. In situ scanning tunneling microscopy of InAs quantum dots on GaAs(0 0 1) during molecular beam epitaxial growth
    G. R. Bell, M. Pristovsek, S. Tsukamoto, B. G. Orr, Y. Arakawa, N. Koguchi
    Surf. Sci. 544(2-3) (2003) 234-240

  36. Gallium-rich reconstructions on GaAs(001)
    M. Pristovsek, S. Tsukamoto, A. Ohtake, N. Koguchi, B. G. Orr, W. G. Schmidt, J. Bernholc
    phys. stat. sol. b 240(1) (2003) 91-98

  37. In-situ study of GaAs growth mechanisms using tri-methyl gallium and tri-ethyl gallium precursors in MOVPE
    M. Pristovsek, M. Zorn, M. Weyers
    J. Crystal Growth 262 (2004) 78-83

  38. Lateral short range ordering of step bunches in InGaAs/GaAs superlattices
    M. Hanke, M. Schmidbauer, R. Kühler, H. Kirmse, M. Pristovsek
    J. Appl. Phys. 95(4) (2004) 1736-1739

  39. In-situ study of low-temperature growth and Mn, Si, Sn doping of GaAs (001) in molecular beam epitaxy
    M. Pristovsek, S. Tsukamoto
    J. Crystal Growth 265 (2004) 425-433

  40. Structural analysis by reflectance anisotropy spectroscopy: As and Sb on GaAs(110)
    O. Pulci, K. Fleischer, M. Pristovsek, S. Tsukamoto, R. Del Sole, W. Richter
    J. Phys.: Condens. Matter 16 (2004) S4367-S4374

  41. Nitrogen.arsenic exchange processes and investigation of the nitrided GaAs surfaces in MOVPE
    V. Hoffmann, F. Poser, C. Kaspari, S. Weeke, M. Pristovsek, W. Richter
    J. Crystal Growth 272 (2004) 30-36

  42. InN Growth and Annealing Investigations using in-situ Spectroscopic Ellipsometry
    M. Drago, T. Schmidtling, C. Werner, M. Pristovsek, U.W. Pohl, W. Richter
    J. Crystal Growth 272 (2004) 87-93

  43. Growth of strained GaAsSb layers on GaAs (001) in MOVPE
    M. Pristovsek, M. Zorn, U. Zeimer, M. Weyers
    J. Crystal Growth 276 (2005) 347-353

  44. A fast reflectance anisotropy spectrometer for in situ growth monitoring
    Ch. Kaspari, M. Pristovsek, W. Richter
    phys. stat. sol. (b) 242(13) (2005) 2561-2569

  45. Development of InN metalorganic vapor phase epitaxy using in-situ spectroscopic ellipsometry
    M. Drago, C. Werner, M. Pristovsek, U. W. Pohl, W. Richter
    Cryst. Res. Technol. 40(10-11) (2005) 993-996

  46. InN growth on sapphire using different nitridation procedures
    M. Drago, C. Werner, M. Pristovsek, U. W. Pohl, W. Richter
    phys. stat. sol. (a) 203(7) (2006) 1622-1625

  47. In-situ Scanning Tunneling Microscopy during Metal-organic Vapour Phase Epitaxy
    B. Rähmer, M. Pristovsek, M. Breusing, R. Kremzow, W. Richter
    Appl. Phys. Lett. 89(6) (2006) 063108

  48. Modified STM images growth inside an MOCVD chamber
    Markus Pristovsek
    compound semiconductor 11(12) (2006) 14-16

  49. in-situ Scanning Tunnelling Microscopy during Metal-Organic Vapour Phase Epitaxy
    M. Pristovsek, B. Rähmer, M. Breusig, R. Kremzow, W. Richter
    J. Crystal Growth 298 (2007) 8-11

  50. Homoepitaxial growth rate measurement using in-situ Reflectance Anisotropy Spectroscopy
    Ch. Kaspari, M. Pristovsek, W. Richter
    J. Crystal Growth 298 (2007) 46-49

  51. Segregation and desorption of antimony in InP in MOVPE
    S. Weeke, M. Leyer, M. Pristovsek, F. Brunner, W. Richter
    J. Crystal Growth 298 (2007) 159-162

  52. In-situ monitoring for nano-structure growth in MOVPE
    Markus Pristovsek, Wolfgang Richter
    in Semiconductor Nanostructures
    Ed. by D. Bimberg (Springer Berlin-Heidelberg-New York (2008) Kapitel 3)

  53. Properties of InMnP (0 0 1) grown by MOVPE
    M. Pristovsek, A. Philippou, B. Rähmer, W. Richter
    J. Crystal Growth 310 (2008) 4046-4049

  54. Ripening of InAs quantum dots on GaAs (0 0 1) investigated with in situ scanning tunneling microscopy in metal–organic vapor phase epitaxy
    Raimund Kremzow, Markus Pristovsek, Michael Kneissl
    J. Crystal Growth 310 (2008) 4751-5753

  55. The critical thickness of InGaN on (0001) GaN
    M. Leyer, J. Stellmach, Ch. Meissner, M. Pristovsek, M. Kneissl
    J. Crystal Growth 310 (2008) 4913-4915

  56. Indium nitride quantum dot growth modes in metalorganic vapour phase epitaxy
    Christian Meissner, Simon Ploch, Martin Leyer, Markus Pristovsek, Michael Kneissl
    J. Crystal Growth 310 (2008) 4959-4962

  57. Growth and characterisation of manganese doped InAsP
    M. Pristovsek, Ch. Meißner, M. Kneissl, R. Jakomin, S. Vantaggio, L. Tarricone
    J. Crystal Growth 310 (2008) 5028-5031

  58. Volmer-Weber growth mode on InN quantum dots on GaN (0001) by MOVPE
    C. Meißner, S.Ploch, M. Pristovsek, M. Kneissl
    phys. stat. sol. (c) 6(S2) (2009) S545-S548

  59. Growth mode of InGaN on GaN (0001) in MOVPE
    M. Pristovsek, J. Stellmach, M. Leyer, M. Kneissl
    phys. stat. sol. (c) 6(S2) (2009) S565-S569

  60. Shape of InN nanostructures on GaN (001)
    S. Ploch, C. Meißner, M. Pristovsek, M. Kneissl
    phys. stat. sol. (c) 6(S2) (2009) S574-S577

  61. Determination of the complex linear electro-optic coefficient of GaAs and InP
    M. Pristovsek
    phys. stat. sol. (b) (submitted)

  62. Metalorganic Vapor Phase Epitaxy of InN on GaN using tertiary-butylhydrazine as Nitrogen Source
    R. Kremzow, M. Pristovsek, J. Stellmach, Ö. Savaş, M. Kneissl
    J. Crystal Growth (submitted)

  63. AlGaN particle formation during MOVPE
    J. Stellmach M. Pristovsek, Ö. Savaş, J. Schlegel, M. Kneissl, E. Y. Yakovlev
    phys. stat. sol. (a) (submitted)

  64. Orientation control of GaN {11-22} and {10-13} grown on (10-10) sapphire by metal-organic vapor phase epitaxy
    S. Ploch, M. Frentrup, M. Pristovsek, M. Kneissl
    J. Crystal Growth (submitted)

  65. Growth of semipolar (10-1-3) InN on m-plane sapphire using metal-organic vapor phase epitaxy
    Duc V. Dinh, M. Pristovsek, R. Kremzow, M. Kneissl
    Appl. Phys. Lett. (submitted)

  66. Growth of AlGaN with high Al-content and high growth rates in a CCS reactor
    J.Stellmach, Ö. Savaş, J. Schlegel, M. Pristovsek, M. Kneissl
    J. Crystal Growth (to be submitted)

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